Product list > Semiconductors and Electronic Materials > 4-Point Probe
4-Point Probe [NPS Version]
NPS 4-point probes are manufactured and assembled in Japan to ensure stable supply and measurement accuracy. A 4-point probe is like the sensor part of a machine. Needless to say, the performance of this sensor part affects the measurement results.
The reliability of our 4-point probes has been recognized by many users.
We have our own measuring instruments available, but other manufacturers' resistance measuring instruments can also be used. (In this case, a banana plug or similar device must be attached as a connector.
The newly developed needle has a one-piece structure made of highly durable metal, and uses a low-resistance metal for the connection part to maintain good electrical conductivity, We ensure the accurate measurement of variety samples by conducting NPS's unique "Micro-edge contact" treatment. (IP=Ion implantation wafer, MT=Metal wafer, SB=Substrate silicon wafer, EP=Epitaxial wafer etc. for types of wafers ) We possesses a lot of experiences and solid accomplishments in this field.
<Features>
high accuracy, hight durability, world standard instrument, quick repair, unique design, etc.
【Related products】Sheet Resistance Measuring Instruments
■ 4-point probe
4-POINT PROBE with no fatal flaws！
More than half a century has passed since the first 4-point probe head was introduced to the world, and today it has become a universal standard in semiconductor inspection. With over 50 years of sales experience in Japan, NPS four probe heads have evolved to become higher-performance probes than the commonly sold four probe heads. We offer highly reproducible four probe heads that are compatible with NAPSON, MPP, JANDEL, KLA, and other point probes and overcome technical shortcomings. If you are not satisfied with your current four point probe head , please try our four point probe heads.
The new 4-point probes have the following features.
Major improvements and features:
Accuracy improvement
Durability improvement
Cost reduction
improvement of fatal defects of conventional products)
Made in Japan and Japan Quality.
■ 4-Point Probe
Please ask us about the 4-point probe !
Because we have 50 years of handling experience.
Each part constituting the 4-point probe is made from the development and production of dedicated processing machines.
By doing quality control from manufacturing to shipping by full-time technical staff, it is possible to provide high-precision, high-durability 4-point probes.
In addition, in order to respond to requests from domestic users and with years of our experience, we set up our own specifications and assemble them.
The NP type which NPS supplies is 4-point probe of the world highest quality.
We also offer repair or modification of various 4-point probes. Please feel free to contact us for more information.
Repair, Reconditioning, and Adjustment of Four-Point Probes
Used 4-point probes can be repaired and adjusted for reuse. In addition, running costs can be reduced by replacing only consumables such as needles and guides.
Repairable Probe Type
Napson
KLA Tencor
MPP
FELL
■ Hand-Probe
It is a handy type 4-point probe which can be easily measured on hand.
It can be used for ingots etc.
■ 0.1mm Pitch
MODEL SEP-4 is a 4-point probe for measuring sheet resistance with a needle spacing of 0.1 mm pitch. Since the distance between the four needles is as small as 0.3 mm (linear), the influence range of electric field energy is small, and even in the case of a pad with a small area of 5 × 5 mm, sheet resistance measurement is not affected by electric field power from the edge to around 0.5 mm.
Can be mounted and fixed to our micro positioner 800MRF.
Tip material Tungsten (W), Beryllium copper (BeCu)
Tip shape Flat (F), Round (R)
Needle spacing 0.1 mm (total distance 0.3 mm) or 0.3 mm (0.6 mm)
Lead wire 90cm Banana plug, etc. can be attached as an option.
■ Reference Sample
We also provide standard samples to check if the 4-point probes currently in use are functioning properly.
When measuring by the DC four point probe method, regular probe maintenance and calibration are essential. A standard sample can help with this.
This sample is not a traceable standard, it is a reference sample.
Accessories include a protective case and a certificate of measurement of sample.
Specification
Chromium Thin Film
Film thickness 1000Å
Square about 1inch(25mmx25mm)
Surface resistivity is 23Ω/□
Data from 5 repeatability measurements of the center of a reference sample.(Measured with a standard 1mm pitch 4 probe)
Reference samples are measured under the same conditions when shipped.
4-Point Probe Various specifications
Wiring Diagrams
Various compatible models (our specifications)
